Ambient-dried low dielectric SiO2 aerogel thin film

Hee Sun Yang; Se Young Choi; Sang Hoon Hyun; Hyung Ho Park; Jung Kyun Hong

doi:10.1016/S0022-3093(97)00335-9

Ambient-dried low dielectric SiO₂ aerogel thin film

Hee Sun Yang, Se Young Choi, Sang Hoon Hyun, Hyung Ho Park, Jung Kyun Hong

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

98 Citations (Scopus)

Abstract

Silica sol synthesized by two steps was deposited on Si(100) substrate by spin coating. After aging and washing the wet gel film was modified with TMCS (trimethylchlorosilane) to prevent additional condensation during drying. By detecting -CH₃(C-H) substituted for -OH species, surface modification was identified by DTA and FTIR. Films dried were heated at different temperatures to investigate heating temperature effects on silica thin film properties. When heated in the range of temperatures (200-500°C), crack-free silica thin films with refractive indices of 1.23-1.15 and dielectric constant 2.2-2.8 were synthesized.

Original language	English
Pages (from-to)	151-156
Number of pages	6
Journal	Journal of Non-Crystalline Solids
Volume	221
Issue number	2-3
DOIs	https://doi.org/10.1016/S0022-3093(97)00335-9
Publication status	Published - 1997 Dec

Bibliographical note

Funding Information:
The authors wish to appreciate ETRI (Electronic Telecommunicative Research Institute), for financial support of this work.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

Access to Document

10.1016/S0022-3093(97)00335-9

Cite this

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title = "Ambient-dried low dielectric SiO2 aerogel thin film",

abstract = "Silica sol synthesized by two steps was deposited on Si(100) substrate by spin coating. After aging and washing the wet gel film was modified with TMCS (trimethylchlorosilane) to prevent additional condensation during drying. By detecting -CH3(C-H) substituted for -OH species, surface modification was identified by DTA and FTIR. Films dried were heated at different temperatures to investigate heating temperature effects on silica thin film properties. When heated in the range of temperatures (200-500°C), crack-free silica thin films with refractive indices of 1.23-1.15 and dielectric constant 2.2-2.8 were synthesized.",

author = "Yang, {Hee Sun} and Choi, {Se Young} and Hyun, {Sang Hoon} and Park, {Hyung Ho} and Hong, {Jung Kyun}",

note = "Funding Information: The authors wish to appreciate ETRI (Electronic Telecommunicative Research Institute), for financial support of this work. ",

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T1 - Ambient-dried low dielectric SiO2 aerogel thin film

AU - Yang, Hee Sun

AU - Choi, Se Young

AU - Hyun, Sang Hoon

AU - Park, Hyung Ho

AU - Hong, Jung Kyun

N1 - Funding Information: The authors wish to appreciate ETRI (Electronic Telecommunicative Research Institute), for financial support of this work.

PY - 1997/12

Y1 - 1997/12

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AB - Silica sol synthesized by two steps was deposited on Si(100) substrate by spin coating. After aging and washing the wet gel film was modified with TMCS (trimethylchlorosilane) to prevent additional condensation during drying. By detecting -CH3(C-H) substituted for -OH species, surface modification was identified by DTA and FTIR. Films dried were heated at different temperatures to investigate heating temperature effects on silica thin film properties. When heated in the range of temperatures (200-500°C), crack-free silica thin films with refractive indices of 1.23-1.15 and dielectric constant 2.2-2.8 were synthesized.

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