We present the characteristics of titanium dioxide (TiO2) inorganic film deposited by RF magnetron sputtering for liquid crystal display applications in this paper. TiO2 films supported vertically aligned liquid crystal (LC) molecules based on ion-beam (IB) irradiation time dependence. Uniform alignment was obtained only when the incident time was two minutes with 1.8 keV of incident energy and an incident angle of 45°. Energy from uniform high-density plasma by IB irradiation affected the interaction between the TiO2 layer and LC molecules to produce vertical alignment of the LC molecules.
Bibliographical noteFunding Information:
This research was supported by the MKE (The Ministry of Knowledge Economy), Korea under the ITRC (Information Technology Research Center) Support program supervised by the NIPA (National IT Industry Promotion Agency) (NIPA-2009-C1090-0902-0018).
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics