Aging effect of SiO2 xerogel film on its microstructure and dielectric properties

Jung Ho Kim, Hong Ryul Kim, Hyung Ho Park, Sang Hoon Hyun

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The properties of porous SiO2 xerogel film strongly depend on the aging process. The morphology of the surface modified SiO2 xerogel film pre-aged for 1 hr at 70 °C showed a two-dimensional structure. Aging for 12 h at 70 °C and successive modification of the film induced some particle growth and a three-dimensional network structure. The microstructure of the modified SiO2 xerogel films reflects the preformed structure during aging. The surface modification induced the changes of surface coverage from -OC2H5 and -OH bonds to -CH3. However the content of surface chemical species was almost same regardless of aging time. The porosity of the modified sample pre-aged for 12 h at 70 °C was 89%. The calculated/measured dielectric constants were 1.31/1.42, respectively.

Original languageEnglish
Pages (from-to)452-456
Number of pages5
JournalApplied Surface Science
Publication statusPublished - 2001 Jan 15

Bibliographical note

Funding Information:
The authors of this paper would like to thank the Samsung Electronics Corporation for its support of this research.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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