Aerosol particle size spectrometer using a micromachined cascade impactor

Hong Lae Kim; Jang Seop Han; Sang Myun Lee; Hong Bum Gown; Jungho Hwang; Yong Jun Kim

doi:10.1109/MEMSYS.2017.7863345

Aerosol particle size spectrometer using a micromachined cascade impactor

Hong Lae Kim, Jang Seop Han, Sang Myun Lee, Hong Bum Gown, Jungho Hwang, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	84-86
Number of pages	3
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863345
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863345

Cite this

Kim, H. L., Han, J. S., Lee, S. M., Gown, H. B., Hwang, J., & Kim, Y. J. (2017). Aerosol particle size spectrometer using a micromachined cascade impactor. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 84-86). [7863345] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863345

Kim, Hong Lae ; Han, Jang Seop ; Lee, Sang Myun et al. / Aerosol particle size spectrometer using a micromachined cascade impactor. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 84-86 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Aerosol particle size spectrometer using a micromachined cascade impactor",

abstract = "This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.",

author = "Kim, {Hong Lae} and Han, {Jang Seop} and Lee, {Sang Myun} and Gown, {Hong Bum} and Jungho Hwang and Kim, {Yong Jun}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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doi = "10.1109/MEMSYS.2017.7863345",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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}

Kim, HL, Han, JS, Lee, SM, Gown, HB, Hwang, J & Kim, YJ 2017, Aerosol particle size spectrometer using a micromachined cascade impactor. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863345, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 84-86, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863345

Aerosol particle size spectrometer using a micromachined cascade impactor. / Kim, Hong Lae; Han, Jang Seop; Lee, Sang Myun et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 84-86 7863345 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.

AB - This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.

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BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

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Kim HL, Han JS, Lee SM, Gown HB, Hwang J , Kim YJ. Aerosol particle size spectrometer using a micromachined cascade impactor. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 84-86. 7863345. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863345

Aerosol particle size spectrometer using a micromachined cascade impactor

Abstract

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Bibliographical note

All Science Journal Classification (ASJC) codes

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