This paper presents the performance characteristics of an air-suspended high-Q MEM inductor that is characterized based on an open-short deembedding scheme and used for accurate and reliable evaluation of the parasitic effects experienced from feed lines as well as contact pads. The validity and effectiveness of the de-embedding method are proven with a fixed-length MEM transmission line along with various feed-line topologies. The measured inductances of the 20-μm elevated transmission line provide consistent data, as compared to the simpler open de-embedding method. For more realistic and complicated MEM inductors with 1.5 and 2.5 turns, the characterized inductance values agree very well with the calculated data, based on the Greenhouse algorithm. The measured and calculated inductances are within the 5% range.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering