A study on crucible inner pressure change during degradation of liq in amoled mass production

Sungmoon Kim, Taekgi Lee, Daejoon Chi, Gyoung O. Ko, Yeonjin Yi, Junho Kim

Research output: Contribution to journalConference articlepeer-review

Abstract

We developed crucible inner pressure sensor for evaporation source that is used widely in AMOLED mass production. It can be installed at crucible and can directly measure crucible inner pressure without contamination. We tested the degradation of Liq by using inner pressure sensor. And we found unexpected increase of crucible inner pressure during degradation of Liq. We assumed that it is caused by released gas during degradation. We studied on degradation mechanism by using RGA and 1H NMR and found out the gas is hydrogen that is produced from Liq during degradation process. We think this behavior of inner pressure during degradation can be used as alarm signal for preventing loss in AMOLED mass production line.

Original languageEnglish
Pages (from-to)282-284
Number of pages3
JournalDigest of Technical Papers - SID International Symposium
Volume52
Issue number1
DOIs
Publication statusPublished - 2021
Event58th International Symposium on Digest of Technical Papers, ICDT 2021 - Virtual, Online
Duration: 2021 May 172021 May 21

Bibliographical note

Publisher Copyright:
© 2021 SID.

All Science Journal Classification (ASJC) codes

  • General Engineering

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