Fingerprint
Dive into the research topics of 'A novel method for forming gate spacer and its effects on the W/WN x/Poly-si gate stack'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A novel method for forming gate spacer and its effects on the W/WN x/Poly-si gate stack
Yong Soo Kim, Kwan Yong Lim, Jae Geun Oh, Se Aug Jang, Heung Jae Cho, Jun Mo Yang, Jai Bum Suh, Su Ock Chung, Soo Young Park, Hong Seon Yang, Hyun Chul Sohn, Jin Woong Kim
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Citations
(Scopus)