TY - GEN
T1 - A novel accelerometer based on contact resistance of integrated carbon nanotubes
AU - Lee, Jae Ik
AU - Eun, Youngkee
AU - Jung, Han Il
AU - Choi, Jungwook
AU - Kim, Jongbaeg
PY - 2011
Y1 - 2011
N2 - A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.
AB - A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ∼ +10 g.
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U2 - 10.1109/MEMSYS.2011.5734479
DO - 10.1109/MEMSYS.2011.5734479
M3 - Conference contribution
AN - SCOPUS:79953770318
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 533
EP - 536
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -