TY - GEN
T1 - A modified polyimide and its application to a microwave relative humidity sensor
AU - Kim, Yong Ho
AU - Lee, Joon Ik
AU - Shin, Kyu Ho
AU - Kim, Yong Jun
PY - 2005
Y1 - 2005
N2 - This paper reports a modified polyimide and its application to a microwave relative humidity (RH) sensor. For a highly sensitive moisture sensing layer, a polyimide was synthesized from oxidianiline (ODA), m-pyromellitic dianhydride (m-PMDA) and N-methlypyrrolidone (NMP) instead of using a commercial polyimide. The synthesized polyimide was applied to a microwave humidity sensor, CPW-to-slotline ring resonator in this case. Characteristics of the fabricated microwave humidity sensor including sensitivity, hysteresis and stability were analyzed for various relative humidity levels. Sensitivity of the RH sensor, in terms of resonant frequency change, was 181 kHz/%RH, hysteresis was 0.013%, and deviation from an average resonant frequency was 0.002% at 40%RH.
AB - This paper reports a modified polyimide and its application to a microwave relative humidity (RH) sensor. For a highly sensitive moisture sensing layer, a polyimide was synthesized from oxidianiline (ODA), m-pyromellitic dianhydride (m-PMDA) and N-methlypyrrolidone (NMP) instead of using a commercial polyimide. The synthesized polyimide was applied to a microwave humidity sensor, CPW-to-slotline ring resonator in this case. Characteristics of the fabricated microwave humidity sensor including sensitivity, hysteresis and stability were analyzed for various relative humidity levels. Sensitivity of the RH sensor, in terms of resonant frequency change, was 181 kHz/%RH, hysteresis was 0.013%, and deviation from an average resonant frequency was 0.002% at 40%RH.
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M3 - Conference contribution
AN - SCOPUS:27544451313
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 1848
EP - 1851
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -