A micropump driven by continuous electrowetting actuation for low voltage and low power operations

Kwang Seok Yun; Ii Joo Cho; Jong Uk Bu; Geun Ho Kim; Young Sam Jeon; Chang Jin Kim; Euisik Yoon

doi:10.1109/MEMSYS.2001.906585

A micropump driven by continuous electrowetting actuation for low voltage and low power operations

Kwang Seok Yun, Ii Joo Cho, Jong Uk Bu, Geun Ho Kim, Young Sam Jeon, Chang Jin Kim, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.

Original language	English
Pages (from-to)	487-490
Number of pages	4
Journal	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2001.906585
Publication status	Published - 2001

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1109/MEMSYS.2001.906585

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@article{313019ce59fe48649c07c5426633e26c,

title = "A micropump driven by continuous electrowetting actuation for low voltage and low power operations",

abstract = "In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.",

author = "Yun, {Kwang Seok} and Cho, {Ii Joo} and Bu, {Jong Uk} and Kim, {Geun Ho} and Jeon, {Young Sam} and Kim, {Chang Jin} and Euisik Yoon",

year = "2001",

doi = "10.1109/MEMSYS.2001.906585",

language = "English",

pages = "487--490",

journal = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

}

TY - JOUR

T1 - A micropump driven by continuous electrowetting actuation for low voltage and low power operations

AU - Yun, Kwang Seok

AU - Cho, Ii Joo

AU - Bu, Jong Uk

AU - Kim, Geun Ho

AU - Jeon, Young Sam

AU - Kim, Chang Jin

AU - Yoon, Euisik

PY - 2001

Y1 - 2001

N2 - In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.

AB - In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.

UR - http://www.scopus.com/inward/record.url?scp=0035008302&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035008302&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2001.906585

DO - 10.1109/MEMSYS.2001.906585

M3 - Article

AN - SCOPUS:0035008302

SN - 1084-6999

SP - 487

EP - 490

JO - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

ER -

A micropump driven by continuous electrowetting actuation for low voltage and low power operations

Abstract

All Science Journal Classification (ASJC) codes

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