A micro pitch and roll motion sensor

Jongbaeg Kim; Liwei Lin

doi:10.1109/SENSOR.2003.1217033

A micro pitch and roll motion sensor

Jongbaeg Kim, Liwei Lin

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1387-1390
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1217033
Publication status	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	03/6/8 → 03/6/12

Bibliographical note

Funding Information:
This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement.

Publisher Copyright:
© 2003 IEEE.

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1217033

Cite this

Kim, J., & Lin, L. (2003). A micro pitch and roll motion sensor. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1387-1390). [1217033] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217033

Kim, Jongbaeg ; Lin, Liwei. / A micro pitch and roll motion sensor. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1387-1390 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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abstract = "This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.",

author = "Jongbaeg Kim and Liwei Lin",

note = "Funding Information: This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement. Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

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Kim, J & Lin, L 2003, A micro pitch and roll motion sensor. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217033, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1387-1390, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1217033

A micro pitch and roll motion sensor. / Kim, Jongbaeg; Lin, Liwei.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1387-1390 1217033 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

AB - This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1 mm x 1 mm x 0.1 mm for picoslider applications. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system. Experimentally, the sensor performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

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Kim J, Lin L. A micro pitch and roll motion sensor. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1387-1390. 1217033. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1217033

A micro pitch and roll motion sensor

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