A micro pitch and roll motion sensor

Jongbaeg Kim; Liwei Lin

doi:10.1016/j.sna.2003.11.034

A micro pitch and roll motion sensor

Jongbaeg Kim, Liwei Lin

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

Characterization of pitch and roll motions of the slider in the hard disk gimbal system is important to achieve higher aerial recording densities. This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1mm×1mm×0.1mm for picoslider applications and the sensor is fabricated by a silicon micromachining process for mass production. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system but it is believed that this sensor could provide the best in situ measurement than other currently existing methods. Experimentally, the prototype sensor is capable of detecting pitch and roll angles within ± 3° and the performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

Original language	English
Pages (from-to)	250-259
Number of pages	10
Journal	Sensors and Actuators, A: Physical
Volume	114
Issue number	2-3
DOIs	https://doi.org/10.1016/j.sna.2003.11.034
Publication status	Published - 2004 Sept 1
Event	Selected Papers from Transducers 03 - Boston, MA, United States Duration: 2003 Jun 8 → 2003 Jun 12

Bibliographical note

Funding Information:
This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2003.11.034

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title = "A micro pitch and roll motion sensor",

abstract = "Characterization of pitch and roll motions of the slider in the hard disk gimbal system is important to achieve higher aerial recording densities. This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1mm×1mm×0.1mm for picoslider applications and the sensor is fabricated by a silicon micromachining process for mass production. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system but it is believed that this sensor could provide the best in situ measurement than other currently existing methods. Experimentally, the prototype sensor is capable of detecting pitch and roll angles within ± 3° and the performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.",

author = "Jongbaeg Kim and Liwei Lin",

note = "Funding Information: This work is supported in part by an NSF GOALI grant (CMS-009600) and a gift from Seagate Technology Inc. The devices were fabricated in the UC-Berkeley Microfabrication Laboratory. The authors thank to Mr. Chi-Chen Lee for the discussion on Piezoresistors and Mr. Hyuck Choo for his help on Wyko measurement. ; Selected Papers from Transducers 03 ; Conference date: 08-06-2003 Through 12-06-2003",

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PY - 2004/9/1

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N2 - Characterization of pitch and roll motions of the slider in the hard disk gimbal system is important to achieve higher aerial recording densities. This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1mm×1mm×0.1mm for picoslider applications and the sensor is fabricated by a silicon micromachining process for mass production. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system but it is believed that this sensor could provide the best in situ measurement than other currently existing methods. Experimentally, the prototype sensor is capable of detecting pitch and roll angles within ± 3° and the performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

AB - Characterization of pitch and roll motions of the slider in the hard disk gimbal system is important to achieve higher aerial recording densities. This paper describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider. The size of the fabricated microsensor is designed as 1mm×1mm×0.1mm for picoslider applications and the sensor is fabricated by a silicon micromachining process for mass production. The dynamic behavior of the system is slightly altered as expected in a simulation after the sensor is mounted on the slider and the fundamental frequency shift of pitch and roll motion is calculated to be less than 5% of the original system but it is believed that this sensor could provide the best in situ measurement than other currently existing methods. Experimentally, the prototype sensor is capable of detecting pitch and roll angles within ± 3° and the performance is compared with interferometric measurement data and the mismatch is nominally within 14% in average.

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A micro pitch and roll motion sensor

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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