A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest

Seong Jae Yoo; Hong Beom Kwon; Dong Hyun Kang; Ui Seon Hong; Kyongtae Kim; Yong Jun Kim

doi:10.1109/MEMSYS.2019.8870661

A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest

Seong Jae Yoo, Hong Beom Kwon, Dong Hyun Kang, Ui Seon Hong, Kyongtae Kim, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Nanoparticle monitoring is very important due to their serious health hazard, while personal devices for monitoring them have not been developed yet. To accurately monitor airborne nanoparticles at points of interest on real-time basis, we developed a high-performance MEMS-based condensation particle counter (CPC). Our system could detect extremely small particles (8.6 nm) with high accuracy (deviation within 3.8 % in number concentration), showing high performance comparable to the reference CPC.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	504-506
Number of pages	3
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870661
Publication status	Published - 2019 Jan
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 2019 Jan 27 → 2019 Jan 31

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	19/1/27 → 19/1/31

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2019.8870661

Cite this

Yoo, S. J., Kwon, H. B., Kang, D. H., Hong, U. S., Kim, K., & Kim, Y. J. (2019). A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 504-506). Article 8870661 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870661

Yoo, Seong Jae ; Kwon, Hong Beom ; Kang, Dong Hyun et al. / A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 504-506 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{06f56464d6e7474bba2f4b7e4c2e1c53,

title = "A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest",

abstract = "Nanoparticle monitoring is very important due to their serious health hazard, while personal devices for monitoring them have not been developed yet. To accurately monitor airborne nanoparticles at points of interest on real-time basis, we developed a high-performance MEMS-based condensation particle counter (CPC). Our system could detect extremely small particles (8.6 nm) with high accuracy (deviation within 3.8 % in number concentration), showing high performance comparable to the reference CPC.",

author = "Yoo, {Seong Jae} and Kwon, {Hong Beom} and Kang, {Dong Hyun} and Hong, {Ui Seon} and Kyongtae Kim and Kim, {Yong Jun}",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870661",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

address = "United States",

}

Yoo, SJ, Kwon, HB, Kang, DH, Hong, US, Kim, K & Kim, YJ 2019, A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870661, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 504-506, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 19/1/27. https://doi.org/10.1109/MEMSYS.2019.8870661

A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest. / Yoo, Seong Jae; Kwon, Hong Beom; Kang, Dong Hyun et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 504-506 8870661 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - Nanoparticle monitoring is very important due to their serious health hazard, while personal devices for monitoring them have not been developed yet. To accurately monitor airborne nanoparticles at points of interest on real-time basis, we developed a high-performance MEMS-based condensation particle counter (CPC). Our system could detect extremely small particles (8.6 nm) with high accuracy (deviation within 3.8 % in number concentration), showing high performance comparable to the reference CPC.

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BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

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Yoo SJ, Kwon HB, Kang DH, Hong US, Kim K, Kim YJ. A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 504-506. 8870661. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870661

A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest

Abstract

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Bibliographical note

All Science Journal Classification (ASJC) codes

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