A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

Il Joo Cho; Euisik Yoon

doi:10.1109/OMEMS.2003.1233497

A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

Il Joo Cho, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	123-124
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233497
Publication status	Published - 2003
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 2003 Aug 18 → 2003 Aug 21

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	03/8/18 → 03/8/21

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

All Science Journal Classification (ASJC) codes

Engineering(all)

Access to Document

10.1109/OMEMS.2003.1233497

Cite this

Cho, I. J., & Yoon, E. (2003). A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 123-124). Article 1233497 (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233497

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title = "A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency",

abstract = "A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.",

author = "Cho, {Il Joo} and Euisik Yoon",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",

year = "2003",

doi = "10.1109/OMEMS.2003.1233497",

language = "English",

series = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

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Cho, IJ & Yoon, E 2003, A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233497, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 123-124, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 03/8/18. https://doi.org/10.1109/OMEMS.2003.1233497

A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency. / Cho, Il Joo; Yoon, Euisik.
2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 123-124 1233497 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.

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M3 - Conference contribution

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BT - 2003 IEEE/LEOS International Conference on Optical MEMS

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A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

Abstract

Publication series

Conference

Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

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