Abstract
This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A low loss of 0.35dB/cm at 25GHz has been achieved in the fabricated transmission lines.
| Original language | English |
|---|---|
| Pages | 136-139 |
| Number of pages | 4 |
| Publication status | Published - 2003 |
| Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23 |
Other
| Other | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
|---|---|
| Country/Territory | Japan |
| City | Kyoto |
| Period | 03/1/19 → 03/1/23 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering