TY - GEN
T1 - A highly sensitive micro-thermal sensor for hydrogen detection
AU - Park, Se Chul
AU - Yoon, Seung Il
AU - Lee, Chung Il
AU - Song, Soonho
AU - Kim, Yong Jun
PY - 2007
Y1 - 2007
N2 - This paper reports a new MEMS-based chemical sensor for hydrogen gas detection, using a highly sensitive micro-thermal sensor. The proposed micro-thermal sensor detects the reaction heat between novel metal catalyst and hydrogen by measuring dc voltage from Cr-Bi thermopile. The proposed micro-thermal sensor, which consists of reference and sensing thermopile, was fabricated on a high thermal resistivity layer for reducing parasitic heat transfer. A metal catalyst was deposited on only the sensing thermopile. And then, In order to remove noises such as external change of temperature, gas flow and electrical noise, a difference between output signals of reference and sensing thermopile was measured by using differential amplifier. To verify its feasibility of the sensor for hydrogen gas detection, various concentrations (0.1, 0.5, 1%) of hydrogen gas were measured. The result of the measurement shows that output voltages of the sensor increases linearly according to the gas concentrations.
AB - This paper reports a new MEMS-based chemical sensor for hydrogen gas detection, using a highly sensitive micro-thermal sensor. The proposed micro-thermal sensor detects the reaction heat between novel metal catalyst and hydrogen by measuring dc voltage from Cr-Bi thermopile. The proposed micro-thermal sensor, which consists of reference and sensing thermopile, was fabricated on a high thermal resistivity layer for reducing parasitic heat transfer. A metal catalyst was deposited on only the sensing thermopile. And then, In order to remove noises such as external change of temperature, gas flow and electrical noise, a difference between output signals of reference and sensing thermopile was measured by using differential amplifier. To verify its feasibility of the sensor for hydrogen gas detection, various concentrations (0.1, 0.5, 1%) of hydrogen gas were measured. The result of the measurement shows that output voltages of the sensor increases linearly according to the gas concentrations.
UR - http://www.scopus.com/inward/record.url?scp=48349090465&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48349090465&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.4388370
DO - 10.1109/ICSENS.2007.4388370
M3 - Conference contribution
AN - SCOPUS:48349090465
SN - 1424412617
SN - 9781424412617
T3 - Proceedings of IEEE Sensors
SP - 197
EP - 200
BT - The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
T2 - 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Y2 - 28 October 2007 through 31 October 2007
ER -