A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Heon Min Lee; Hong Teuk Kim; Hyung Kyu Choi; Hee Chul Lee; Hyung Ki Hong; Don Hee Lee; Joung Uk Bu; Euisik Yoon

A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hee Chul Lee, Hyung Ki Hong, Don Hee Lee, Joung Uk Bu, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO₂ at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	490-493
Number of pages	4
Publication status	Published - 2006
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Other

Other	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	06/1/22 → 06/1/26

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Lee, H. M., Kim, H. T., Choi, H. K., Lee, H. C., Hong, H. K., Lee, D. H., Bu, J. U., & Yoon, E. (2006). A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 490-493). [1627843] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Lee, Heon Min ; Kim, Hong Teuk ; Choi, Hyung Kyu et al. / A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. pp. 490-493 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection",

abstract = "In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.",

author = "Lee, {Heon Min} and Kim, {Hong Teuk} and Choi, {Hyung Kyu} and Lee, {Hee Chul} and Hong, {Hyung Ki} and Lee, {Don Hee} and Bu, {Joung Uk} and Euisik Yoon",

year = "2006",

language = "English",

isbn = "0780394755",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "490--493",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

}

Lee, HM, Kim, HT, Choi, HK, Lee, HC, Hong, HK, Lee, DH, Bu, JU & Yoon, E 2006, A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627843, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 490-493, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. / Lee, Heon Min; Kim, Hong Teuk; Choi, Hyung Kyu et al.
19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 490-493 1627843 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lee, Heon Min

AU - Kim, Hong Teuk

AU - Choi, Hyung Kyu

AU - Lee, Hee Chul

AU - Hong, Hyung Ki

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N2 - In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

AB - In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250°C. Generally, VOCs are decomposed to CO and CO2 at the temperature of above 200°C, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

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Lee HM, Kim HT, Choi HK, Lee HC, Hong HK, Lee DH et al. A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection. In 19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 490-493. 1627843. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Abstract

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All Science Journal Classification (ASJC) codes

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