A high-performance MEMS transformer for silicon RF ICS

Engineering

• Microelectromechanical System 100%
• Silicon 100%
• Radio Frequency 50%
• Silicon Substrate 50%
• Surface Micro-Machining 50%
• Integrated Circuit 50%
• Equivalent Circuit Model 50%
• Ohmic Loss 50%
• Performance 50%
• Substrates 50%
• Characteristics 50%
• Coupling Loss 50%