Abstract
A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively.
| Original language | English |
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| Pages | 259-262 |
| Number of pages | 4 |
| Publication status | Published - 2003 |
| Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23 |
Other
| Other | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
|---|---|
| Country/Territory | Japan |
| City | Kyoto |
| Period | 03/1/19 → 03/1/23 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering