A directly patternable click-active polymer film via initiated chemical vapor deposition (iCVD)

Sung Gap Im, Byeong Su Kim, Wyatt E. Tenhaeff, Paula T. Hammond, Karen K. Gleason

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


A new "click chemistry" active functional polymer film was directly obtained from a commercially available monomer of propargyl acrylate (PA) via easy, one-step process of initiated chemical vapor deposition (iCVD). Fourier transform infrared (FTIR) spectra confirmed that significant amount of the click-active acetylene functional group was retained after the iCVD process. The degree of crosslinking could be controlled by intentionally adding crosslinker, such as ethylene glycol diacrylate (EGDA) that was polymerized with PA to form click-active, completely insoluble copolymer. The formed iCVD polymers could also be grafted on various inorganic substrates with silane coupling agents. These crosslinking and grafting techniques give iCVD polymers chemical and mechanical stability, which allows iCVD polymers applicable to various click chemistry without any modification of reaction conditions. Pre-patterned iCVD polymer could be obtained via photolithography and an azido-functionalized dye molecule was also successfully attached on iCVD polymer via click chemistry. Moreover, pPA film demonstrated sensitivity to e-beam irradiation, which enabled clickable substrates having nanometer scale patterns without requiring the use of an additional e-beam resist. Direct e-beam exposure of this multifunctional iCVD layer, a 200 nm pattern, and QD particles were selectively conjugated on the substrates via click chemistry. Thus, iCVD pPA has shown dual functionality as of "clickable" e-beam sensitive material.

Original languageEnglish
Pages (from-to)3606-3611
Number of pages6
JournalThin Solid Films
Issue number12
Publication statusPublished - 2009 Apr 30

Bibliographical note

Funding Information:
This research was supported by the U.S. Army through the Institute for Soldier Nanotechnologies, under Contract DAAD-19-02-D-0002 with the U.S. Army Research Office. This work made use of MIT's shared scanning-electron-beam-lithography facility in the Research Laboratory of Electronics.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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