Abstract
A bi-directional microactuator powered by the combination of electrothermal and electromagnetic forces is successfully demonstrated using both the Poly-MUMPs surface micromachining process and a 50μm SOI process. High output force has been measured from fabricated actuators in both DC and AC operations at non-resonant frequencies. Surface micromachined actuators can move several microns and exert more than 100μN of force, while the larger SOI actuators can move several tens of microns and exert more than 20mN of force. Reliability tests show that the SOI and surface machined actuators have been in operation for more than 1 million and 100 million cycles, respectively, with no sign of degradation.
| Original language | English |
|---|---|
| Pages (from-to) | 450-453 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2004 |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering