Calculated based on number of publications stored in Pure and citations from Scopus
1996 …2025

Research activity per year

Filter
Chapter

Search results

  • 2014

    Back end of the line

    Kim, H., Kim, S. H. & Lee, H. B. R., 2014 Jul 1, Atomic Layer Deposition for Semiconductors. Springer US, Vol. 9781461480549. p. 209-238 30 p.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    4 Citations (Scopus)